Products

Fujian Deer Technology Company Ltd. 

Address: JiaoYang Industrial Zone,ShangHang County,LongYan,Fujian,China

Tel: +86 0597-5331188(Office Tel)

+86 0597-5331166/5331363 (Domestic Tel) 

 +86 0597-5332618( International Tel) 

Fax:0597-5335599
E-mail:  info@fjdeertech.com

Site:www.anzr.com.cn




Products

Tetrafluoromethane
(electronic grade)

instructions

Tetrafluoromethane is a colorless, odorless, non-flammable, inert, compressed gas. It is the largest amount plasma etching gas in the microelectronics industry, can be widely applied to etch Silicon, Silicon dioxide, Silicon nitride, Phospho-silicate glass and Tungsten film materials. It is also used in the surface cleaning, solar cells, laser technology, gas-phase insulation, subzero refrigeration, leakage inspection agents, attitude control of cosmic rockets, and detergents in the printed circuits.


Electronic Grade CF4 Specification


Parameter

Critical Assay

Unit

Deer Specification

Tetrafluoromethane (CF4)

%

≥ 99.9995

Oxygen (O2)

ppm v

≤ 0.5

Nitrogen(N2)

ppm v

≤ 2.0

Carbon Monoxide(CO)

ppm v

≤0.3

Carbon Dioxide(CO2)

ppm v

≤0.5

Sulfur Hexafluoride(SF6)

ppm v

≤0.1

Total Fluorocarbon(TFC

ppm v

≤0.3

Total   Hydrocarbon(as CH4)

ppm v

≤0.3

MoistureH2O

ppm v

≤ 1.0

Acidity ( HF )

ppm v

≤0.1

Total contents of impurity

ppm v

    ≤ 10.0


Packing: Various types optional.

Fujian Deer Technology Company Ltd. 

Tel:0597-5331188      Address: JiaoYang Industrial Zone,ShangHang County,LongYan,Fujian,China


天天啪日日在线观看-99久久爱免费视频视频-男女啪啪啪-日日啪日韩